The world's first Dry※
scroll vacuum pump
ANEST IWATA introduced, the first in the world “Dry (=oil-free) scroll vacuum pump” in 1993. It offered numbers of advantages compared to vacuum pumps with conventional technologies, such as compact in size, providing better ultimate pressure, quieter and less vibration while it was running and with a energy saving feature. To date, dry scroll vacuum pumps have been well accepted in all the industry, such as physics and analytical equipment, semi-conductor processing, automotive and aerospace experiment. Fundamental concepts were close between air compressors and vacuum pumps, however, they were not the same as engineers thought in the first place. As the development project was started from the scratch, engineers encountered so many difficult situations at almost every developmental stage because it was “the First in the World’s Dry Scroll Vacuum Pump” Then-project team member Masaru Tsuchiya, who is a current member of Vacuum Equipment development group, spoke about the story.